Yasukawa Brooks Automation Inc exhibited a dual-arm vacuum transfer robot with a weight capacity of up to 75kg (including robot hands) at Semicon Japan 2008, which is taking place from Dec 3 to 5, 2008, at Makuhari Messe in Chiba Prefecture, Japan.

The robot is intended for the transfer of OLED panels and is capable of carrying two evaporation masks or substrates. The previous models have only one arm and a transfer capacity of up to 65kg, according to the company.

In manufacturing AMOLEDs, organic EL materials corresponding to red, green and blue are usually coated using metal masks assigned for each color. Because the metal masks are heavy, vacuum robots with large transfer capacities have long been sought after.
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